Characterization of a novel hybrid silicon three-axial force sensor
نویسندگان
چکیده
A three-axial silicon based force sensor with a volume less than 7 mm3, developed for biomechanical measurements, has been characterized. Results obtained with two different experimental test benches are reported in this paper. High linearity and low hysteresis during sensor normal l e a m ©
منابع مشابه
Design and fabrication of a hybrid silicon three-axial force sensor for biomechanical applications
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